Title :
Micro-opto mechanical switch integrated on silicon
Author :
Ollier, E. ; Labeye, P. ; Revol, F.
Author_Institution :
LETI, CEA Technol. Avancees, Grenoble, France
fDate :
11/9/1995 12:00:00 AM
Abstract :
A micro-opto-mechanical switch 1*2 has been achieved using a combination of two technologies, integrated optics and micromachining on silicon. The commutation is obtained by means of the mechanical deflection of a cantilever beam driven by an electrostatic force. The first functional results are reported
Keywords :
integrated optics; micromachining; micromechanical devices; optical switches; optical waveguides; silicon; Si; cantilever beam; electrostatic force; integrated optics; mechanical deflection; micro-opto-mechanical switch; micromachining;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951354
