Title :
A Micromachined Electret-Based Transponder for In Situ Radiation Measurement
Author :
Son, Chulwoo ; Ziaie, Babak
Author_Institution :
Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN
Abstract :
This letter reports on the development of a micromachined passive transponder for in situ measurement of ionizing radiation. gamma-ray exposure is remotely measured by monitoring the resonance frequency change correlated with a change in the surface charge of an electret. This is achieved through a micromachined capacitor with a movable plate that is partially filled with a Teflon electret and connected in parallel with an inductor, forming a passive LC tank (a microionization chamber, 1.5 cm in diameter and 3 mm in thickness). Test results show that an exposure of 60 000 R from Cs137 produces a 687-kHz resonance frequency shift (sensitivity of 11.45 kHz/kR)
Keywords :
capacitive sensors; gamma-ray detection; micromachining; radiation monitoring; transponders; 1.5 cm; 3 mm; 687 kHz; Teflon electret; capacitive sensor; dosimeter; inductor; ionizing radiation; microelectro-mechanical system; microionization chamber; micromachined capacitor; micromachined electret-based transponder; micromachined passive transponder; microtransponder; passive LC tank; radiation measurement; resonance frequency; Charge measurement; Current measurement; Electrets; Frequency measurement; Ionizing radiation; Radiation monitoring; Remote monitoring; Resonance; Resonant frequency; Transponders; Capacitive sensor; dosimeter; microelectromechanical system (MEMS); microtransponder;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2006.884717
