Title :
Absolute Value Measurements of Thin Film Permeability
Author :
Shimada, Y. ; Numazawa, J. ; Yoneda, Y. ; Hosono, A.
Author_Institution :
Tohoku University.
Abstract :
A method for highly precise measurement of the permeability of thin films in the VHF frequency range has been developed. The permeability of a film sample in a strong magnetic field can be predicted with very high accuracy; this permeability is then used as the standard of a measurement system. Multilayer films with various spacer thicknesses and a FeZrN micro-crystalline film were measured. Results showed that eddy current losses in the multilayer films cannot be suppressed even with insulating spacers as thick as 2000Ã…, and that the micro-crystalline film exhibits relatively high losses in the high-frequency range.
Keywords :
Eddy currents; Frequency measurement; Insulation; Magnetic field measurement; Magnetic films; Magnetic multilayers; Measurement standards; Permeability measurement; Thickness measurement; Transistors;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1991.4565292
