Title :
Implementing laser-based failure analysis methodologies using test vehicles
Author :
Lewis, Dean ; Pouget, Vincent ; Beaudoin, Félix ; Haller, Gerald ; Perdu, Philippe ; Fouillat, Pascal
Author_Institution :
Lab. IXL, Univ. of Bordeaux, Talence, France
fDate :
5/1/2005 12:00:00 AM
Abstract :
Several test vehicles were designed in order to validate laser-based failure analysis and process validation techniques. Two vehicles concern defect localization in integrated circuits (ICs); the third one is designed for single event upset sensitivity study in digital ICs.
Keywords :
failure analysis; integrated circuit reliability; integrated circuit testing; laser beam applications; optical microscopy; defect localization; digital IC; integrated circuits; laser scanning microscopy; laser testing; laser-based failure analysis; process validation techniques; single event upset sensitivity; Application specific integrated circuits; Circuit testing; Failure analysis; Laser beams; Laser modes; Laser theory; Microscopy; Thermal resistance; Vehicles; Voltage; Defect localization; failure analysis in ICs; laser scanning microscopy; laser testing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2005.845014
