Title :
Transient excitation of silicon microresonator
Author :
Zhang, Lei M. ; Uttamchandan, D. ; Culshaw, Brian
Author_Institution :
Strathclyde Univ., Glasgow, UK
Abstract :
A novel experiment using a single optical source to excite and monitor the vibrations of a silicon microresonator is reported. A 10 mu s, 5 mW laser pulse generates vibrations of the resonator which are detected by a Michelson interferometer. A storage oscilloscope measures the transient response which is analysed using an FFT program.
Keywords :
crystal resonators; elemental semiconductors; light interferometry; silicon; spectral analysis; transducers; vibration measurement; 10 mus; 5 mW; FFT program; Michelson interferometer; Si microresonators; laser pulse generates; micromechanical resonators; single optical source; storage oscilloscope; transient excitation; transient response;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19890108
