DocumentCode
802252
Title
A fab life
Volume
46
Issue
5
fYear
2009
fDate
5/1/2009 12:00:00 AM
Firstpage
20
Lastpage
21
Abstract
Presents a photograph of a clean-room technician holding a polymer film disc that´s been embossed with dozens of microchips using Jenoptik´s microscale thermoforming process.
Keywords
Laboratories; Microelectrodes; Microscopy; Polymer films; Thermoforming;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.2009.4907377
Filename
4907377
Link To Document