Magnetic Properties of Co-Based Multi-Layered Nitride Films

To improve the magnetic properties of Co-based multilayer nitride films, we investigated the conditions of film preparation, including the composition, N2 partial pressure, total gas pressure, annealing temperature and gas-flow rate. The results were the following. The Bs increased with Co content, at the rate of about 1 kG per 3 to 4 at% Co, but did not depend on the annealing temperature at temperatures above 515C. ¿s decreased with increasing Co content, and increased with increasing annealing temperature. Neither ¿s, Hc, or Bs depended on the total gas pressure or gas-flow rate. Near a Co content of 86 at%, ¿s was less than ±1×10^¿6 and Bs was about 13 kG.