• DocumentCode
    803189
  • Title

    Scaling characteristics of the XeF (CA) excimer laser

  • Author

    Dane, Brent C. ; Hirst, Graeme J. ; Yamaguchi, Shigeru ; Hofmann, Thomas ; Wilson, William L., Jr. ; Sauerbrey, Roland ; Tittel, Frank K. ; Nighan, William L. ; Fowler, Michael C.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Rice Univ., Houston, TX, USA
  • Volume
    26
  • Issue
    9
  • fYear
    1990
  • fDate
    9/1/1990 12:00:00 AM
  • Firstpage
    1559
  • Lastpage
    1568
  • Abstract
    The scaling characteristics and medium properties of an injection-controlled XeF(CA) laser pumped by a 10-ns-high current density electron beam have been investigated. A five-component laser gas mixture, consisting of F2, NF3 , Xe, Kr, and Ar was optimized for the scaled laser conditions, resulting in 0.8-J output pulses at 486.8 nm, corresponding to an energy density of small-signal-gain measurements combined with kinetic modeling permitted the characteristics of the dependence of net gain on the electron-beam energy deposition and gas mixture composition, resulting in an improved understanding of XeF(CA) laser operation
  • Keywords
    excimer lasers; laser transitions; xenon compounds; (C→A) excimer laser; 0.8 J; 1.3 percent; 10 ns; 486.8 nm; F2-NF3-Xe-Kr-Ar; XeF laser; electron-beam energy deposition; energy density; five-component laser gas mixture; gas mixture composition; high current density electron beam; injection controlled lasers; kinetic modeling; net gain; scaling characteristics; small-signal-gain measurements; Argon; Current density; Electron beams; Gas lasers; Laser excitation; Laser modes; Noise measurement; Pulse measurements; Pulsed laser deposition; Pump lasers;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/3.102636
  • Filename
    102636