Title :
THz Waveguide Mixers With NbTiN HEBs on Silicon Nitride Membranes
Author :
Muñoz, Pedro Pablo ; Bedorf, Sven ; Brandt, Michael ; Tils, Thomas ; Honingh, Netty ; Jacobs, Karl
Author_Institution :
I Phys. Inst., Koln Univ.
Abstract :
We describe the design and performance of waveguide mixers at 1.4 THz and 1.9 THz based on NbTiN phonon-cooled hot electron bolometers (HEBs) fabricated on a 2-mum thick Si3N4 membrane. The membrane is bonded to a silicon frame in the mixer block using a flip chip process. Simulated RF coupling is compared with experimental results, showing good agreement. Receiver noise temperature measurements show uncorrected values of 1600 K at 1.4 THz and 2100 K at 1.9 THz, both at 1.5GHz intermediate frequency. Device cooling on the membrane seems not to be problematic. The mixers are used in receivers for the Stratospheric Observatory for Infrared Astronomy (SOFIA) [German REceiver At THz frequencies (GREAT)] and the Atacama path finder experiment (APEX) [CO, N+, deuterium observations receiver (CONDOR)]
Keywords :
bolometers; flip-chip devices; niobium compounds; silicon compounds; submillimetre astronomy; submillimetre wave mixers; submillimetre wave receivers; superconducting mixers; waveguide components; 1 micron; 1.4 THz; 1.5 GHz; 1.9 THz; 1600 K; 2100 K; NbTiN; Si3N4; THz waveguide mixers; device cooling; flip chip process; hot electron bolometers; receivers; silicon nitride membranes; Biomembranes; Bolometers; Bonding; Cooling; Electrons; Flip chip; Optical receivers; Radio frequency; Silicon; Temperature measurement; Heterodyne mixer; silicon-nitride membrane; superconducting hot electron bolometer (HEB); terahertz (THz) waveguide;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2006.884907
