• DocumentCode
    804299
  • Title

    Magnetostriction of Sm-Fe Thin Films Fabricated by a Sputtering Method

  • Author

    Honda, T. ; Hayashi, Y. ; Yamaguchi, M. ; Arai, K.I.

  • Author_Institution
    Tokin Corporation
  • Volume
    9
  • Issue
    1
  • fYear
    1994
  • Firstpage
    129
  • Lastpage
    133
  • Abstract
    The magnetostriction and magnetic properties of sputtered SmxFe100-x (3¿x¿54) thin films at room temperature were investigated. Films had an amorphous structure for x¿12. The magnetostriction ¿ of the films increased rapidly under weak fields (≪1 kOe) and reached maximum values in the range 130 to 160×10¿6 at 16 kOe for x=30 to 40, suggesting that Sm-Fe films can be used in microactuators and sensors. The magnetic properties did not show a clear dependence on the sputtering conditions, such as the input power, Ar gas pressure, or substrate temperature (¿250°C).
  • Keywords
    Amorphous materials; Argon; Iron; Magnetic films; Magnetic properties; Magnetic sensors; Magnetostriction; Microactuators; Sputtering; Temperature;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1994.4565805
  • Filename
    4565805
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=804299