Title :
Manipulation of periodic Coulomb blockade oscillations in ultra-scaled memories by single electron charging of silicon nanocrystal floating gates
Author :
Molas, Gabriel ; Jehl, Xavier ; Sanquer, Marc ; De Salvo, Barbara ; Lafond, Dominique ; Deleonibus, Simon
Author_Institution :
Atomic Energy Council-Lab. of Electron., Grenoble, France
fDate :
5/1/2005 12:00:00 AM
Abstract :
Ultra-scaled silicon nanocrystal memories fabricated on a silicon-on-insulator substrate exhibit very periodic Coulomb blockade oscillations at 4.2 K. We control the phase of those oscillations by charging and discharging the floating gate with a single electron. We can distinguish between resonances due to the whole channel area covered by the gate and impurity levels localized in the access regions and less coupled to the gate. Comparison with a reference device without nanocrystals is also reported.
Keywords :
Coulomb blockade; cryogenic electronics; electron beam lithography; elemental semiconductors; nanoelectronics; nanostructured materials; resonant tunnelling devices; semiconductor quantum dots; semiconductor storage; silicon; silicon compounds; silicon-on-insulator; 4.2 K; Si-SiO2; channel area; cryogenic electronics; electron beam lithography; impurity level; nanocrystal floating gates; periodic Coulomb blockade oscillations; quantum dots; resonant tunneling devices; semiconductor memories; silicon-on-insulator substrate; single electron charging; ultra-scaled silicon nanocrystal memories; Electrons; Lithography; Logic devices; MOSFETs; Nanocrystals; Nonvolatile memory; Quantum dots; Resonance; Silicon on insulator technology; Temperature; Cryogenic electronics; electron beam lithography; quantum dots; resonant tunneling (RT) devices; semiconductor memories; silicon-on-insulator (SOI) technology;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2005.846898