Improvement of RF Sputtering by Crossed EM Fields

A method is described whereby the cathode to ground capacitance of an RF sputtering module may be dramatically reduced, thereby cutting the power loss and improving the efficinecy. The technique uses a dc magnetic field, perpendicular to the RF electric field, thereby producing a cycloidal path for electrons and greatly increasing the extent of the Crookes dark space. It is shown that the applied magnetic field must be great enough to require the cycloidal height to be less than the desired dark space width. Experimental observations are described.