A Low Cost Digital Controller for an Electron Lithography System using a Scanning Electron Microscope

A low-cost digital controller is described for use in the generation of lithographic patterns with a scanning electron microscope, for microcircuit fabrication over 100 um x 100 um pattern fields. Resolution of the writing system is set by the microscope and not by the external control circuitry. Fabrication procedures and results are given for test patterns in which minimum line widths of about 0.5 um were attained.