Title :
A novel wet-etching method using joint proton source in LiNbO/sub 3/
Author :
Ting, Tien-Lun ; Chen, Liang-Yin ; Wang, Way-Seen
Author_Institution :
Graduate Inst. of Electro-opt. Eng., Nat. Taiwan Univ., Taipei
Abstract :
By mixing benzoic and adipic acids as the source of proton exchange, wet etched ridge waveguides are fabricated in Z-cut LiNbO3. Under appropriate adipic-benzoic acid concentration ratios, the joint proton source can suppress the proton diffusion in the lateral directions, and thus, the sidewalls are much more vertical than the usual. The etched depths are also enhanced for more than 30%. And meanwhile, the fabricated ridge waveguides possess smooth surfaces and the scattering losses are lower than that of the conventionally produced samples
Keywords :
etching; integrated optics; ion exchange; lithium compounds; optical fabrication; optical materials; optical waveguides; ridge waveguides; LiNbO3; adipic acid; benzoic acid; proton diffusion; proton exchange; ridge waveguides; scattering losses; smooth surface; wet etching; z-cut LiNbO3; Dry etching; Lithium niobate; Optical mixing; Optical modulation; Optical scattering; Optical surface waves; Optical waveguides; Protons; Sputter etching; Wet etching; Integrated optics; lithium niobate; optical ridge waveguide; proton exchange (PE);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.863998
