• DocumentCode
    807646
  • Title

    Determining the Energy Distribution of Pulse-Radiation-Induced Charge in MOS Structures from Rapid Annealing Measurements

  • Author

    Simons, M. ; Hughes, H.L.

  • Author_Institution
    Research Triangle Institute Research Triangle Park, N. C.
  • Volume
    19
  • Issue
    6
  • fYear
    1972
  • Firstpage
    282
  • Lastpage
    290
  • Abstract
    Activation energy distributions for the positive space charge induced in MOS structures by pulsed ionizing radiation have been calculated from shortterm, isothermal annealing data. These distributions are compared for conventional thermal oxides and oxides implanted with aluminum or sodium ions.
  • Keywords
    Aluminum; Annealing; Capacitance-voltage characteristics; Charge measurement; Current measurement; Energy measurement; Ion beams; Laboratories; Measurement techniques; Pulse measurements;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1972.4326846
  • Filename
    4326846
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=807646