DocumentCode
808803
Title
Backside illuminated high saturation current partially depleted absorber photodetectors
Author
Li, X. ; Demiguel, S. ; Li, N. ; Campbell, J.C. ; Tulchinsky, D.L. ; Williams, K.J.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Texas, Austin, TX, USA
Volume
39
Issue
20
fYear
2003
Firstpage
1466
Lastpage
1467
Abstract
A high-saturation-current, backside-illuminated In0.53Ga0.47As photodiode with a partially depleted absorber has been fabricated and tested. The 1 dB small-signal compression current was 199 mA at 1 GHz for a 100 μm diameter photodiode. The 1 dB large-signal compression current was 24 mA at 48 GHz for an 8 μm-diameter photodiode. The responsivity was 0.6 A/ W at 1.55 μm.
Keywords
III-V semiconductors; gallium arsenide; indium compounds; photodetectors; photodiodes; 1 GHz; 1.55 micron; 100 micron; 199 mA; 24 mA; 48 GHz; 8 micron; In0.53Ga0.47As; backside-illuminated photodiode; partially depleted absorber photodetectors; responsivity; saturation current; small-signal compression current;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20030927
Filename
1238606
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