DocumentCode
808953
Title
Simulation of the effect of energetic ion radiation on silicon
Author
McGarrah ; Williamson, W., Jr. ; Keeton, S.C.
Author_Institution
Sandia Nat. Lab., Livermore, CA, USA
Volume
39
Issue
5
fYear
1992
fDate
10/1/1992 12:00:00 AM
Firstpage
1401
Lastpage
1406
Abstract
A set of programs under development to simulate the three-dimensional interaction of high energy ions with solid silicon is described. A classical trajectory Monte Carlo algorithm was used to model the initial ion strike to the target and the primary ionization of electrons produced in the target. The number of primary electrons, along with their position and momenta, were entered as input into a non-relativistic Monte Carlo electron transport code. Both elastic and inelastic scattering events were considered in the simulation of the secondary electron cascade. Inelastic collisions include ionization of all shells. A prediction is made of the quantity and radius of the plume of space charge generated within the semiconductor material due to the cosmic ray ion strike
Keywords
Monte Carlo methods; ion beam effects; silicon; Monte Carlo electron transport code; Si; classical trajectory Monte Carlo algorithm; cosmic ray ion strike; high energy ions; inelastic scattering events; ionization; primary electrons; primary ionization; secondary electron cascade; semiconductor material; space charge; three-dimensional interaction; Discrete event simulation; Electrons; Ion radiation effects; Ionization; Monte Carlo methods; Scattering; Silicon; Solid modeling; Space charge; Trajectory;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/23.173214
Filename
173214
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