Optical reflectometry with micrometer resolution for the investigation of integrated optical devices

Author

Beaud, Paul ; Schütz, Jürg ; Hodel, Walter ; Weber, Heinz P. ; Gilgen, Heinz H. ; Salathé, René P.

Author_Institution

Inst. of Appl. Phys., Berne Univ., Switzerland

Volume

25

Issue

4

fYear

1989

fDate

4/1/1989 12:00:00 AM

Firstpage

755

Lastpage

759

Abstract

An optical time-domain reflectometry (OTDR) system using an infrared subpicosecond pulse source in conjunction with balanced heterodyne detection is discussed. Experimental results show a density of more than 100 dB and a resolution of 60 μm in air. Taking advantage of the large tuning range of the laser system, it is possible to improve the resolution to less than 10 μm. The applicability of the OTDR system for the diagnostics of integrated optical devices is demonstrated for a simple GaAs waveguide structure

Keywords

III-V semiconductors; gallium arsenide; integrated optics; optical testing; optical waveguides; time-domain reflectometry; GaAs; OTDR; balanced heterodyne detection; infrared subpicosecond pulse source; integrated optical devices; large tuning range; laser system; micrometer resolution; optical time-domain reflectometry system; resolution; semiconductor; waveguide structure; Infrared detectors; Laser tuning; Optical devices; Optical mixing; Optical pulses; Optical tuning; Optical waveguides; Reflectometry; Time domain analysis; Waveguide lasers;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/3.17341

Filename

17341