Title :
Diagnostics of TM010-mode microwave cavity discharges in CO2-N2-He laser gas mixtures. I. Measurement of dielectric constant
Author :
Ikeda, Tetsuya ; Danno, Minoru
Author_Institution :
Adv. Technol. Res. Center, Mitsubishi Heavy Ind. Ltd., Hiroshima, Japan
fDate :
8/1/1995 12:00:00 AM
Abstract :
Plasma parameters in the microwave discharged CO2 laser gas mixtures of CO2-N2-He=0.9/2.5/20 at 25 Torr obtained using the perturbation method for a TM010-mode cylindrical resonant cavity were examined. From the changes in resonant frequencies and Q values of the cavity, dielectric constant of the discharged plasma under the condition of RF to laser output power conversion ratio of 14% at mass flow rate of 4.2 kg/h was determined to be nearly 0.96-0.01j. It was also obtained from the dielectric constants of the plasma that electron number density, the electron temperature, and discharge parameters (E/n) were (0.3-3)×1015m-3, 0.5-2.7 eV, and (0.5-2)×10-15 Vcm2, respectively
Keywords :
carbon compounds; cavity resonators; discharges (electric); gas lasers; gas mixtures; helium; high-frequency discharges; nitrogen; permittivity; plasma; plasma density; plasma diagnostics; plasma properties; plasma temperature; 25 torr; CO2; CO2-N2-He; Q values; RF power; TM010-mode; TM010-mode microwave cavity discharges; cylindrical resonant cavity; dielectric constant; discharge parameters; discharged plasma; electron number density; electron temperature; laser gas mixtures; laser output power; mass flow rate; microwave discharge; perturbation method; resonant frequencies; Dielectric constant; Electrons; Gas lasers; Masers; Microwave theory and techniques; Perturbation methods; Plasma density; Plasma diagnostics; Plasma temperature; Resonance;
Journal_Title :
Quantum Electronics, IEEE Journal of
