Fabrication and Measurement of Low-Stress Polyimide Membrane for High-Resolution Variable Optical Attenuator

Author

Su, Guo-Dung J. ; Yeh, Yu-Wei ; Chiu, Chen-Wei E. ; Li, Chao-Hu ; Chen, Tyng-Yow

Author_Institution

Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei

Volume

13

Issue

2

fYear

2007

Firstpage

312

Lastpage

315

Abstract

We have fabricated low-stress polyimide membranes for use as high-resolution variable optical attenuator (VOA). Polyimide membranes are assembled with fiber collimators to perform 3-D beam spoiling that varies the optical power with 0.01-dB resolution. The measured residual stress and Young´s modulus of the polyimide membrane are 3.2 MPa and 15 GPa, respectively. The 41-mum deformation of the membrane is demonstrated by the electrostatic force with 170 volts. The 0.46-dB insertion loss and >15-dB dynamic range are achieved at 1550-nm wavelength

Keywords

Young´s modulus; deformation; internal stresses; micro-optics; micromechanical devices; optical attenuators; optical collimators; optical fabrication; optical fibres; optical losses; optical polymers; 0.46 dB; 15 GPa; 1550 nm; 170 V; 3.2 MPa; Young modulus; electrostatic force; fiber collimators; insertion loss; polyimide membrane; residual stress; variable optical attenuator; Assembly; Attenuation measurement; Biomembranes; Electrostatic measurements; Optical attenuators; Optical collimators; Optical device fabrication; Polyimides; Stress measurement; Wavelength measurement; Large stroke; low stress; polyimide; variable optical attenuator (VOA);

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2007.893270

Filename

4159997