DocumentCode
810800
Title
De-embedding coplanar probes with planar distributed standards
Author
Williams, Dylan F. ; Miers, Tom H.
Author_Institution
Ball Aerosp. Syst. Div., Boulder, CO, USA
Volume
36
Issue
12
fYear
1988
Firstpage
1876
Lastpage
1880
Abstract
Two methods to de-embed coplanar probes using offset coplanar waveguide shorts and transmission lines are described. The accuracy of the de-embedded measurements is verified. The S-parameters of lumped standards provided by the manufacturer of the probes are measured and found to be suitable for purposes of calibration up to 26 GHz.<>
Keywords
S-parameters; calibration; integrated circuit testing; measurement standards; microwave measurement; probes; semiconductor device testing; 26 GHz; CPW; MMICs; S-parameters; SHF; calibration; coplanar probes; de-embedded measurements; deembedding; lumped standards; microwave device testing; microwave transistors; offset coplanar waveguide shorts; planar distributed standards; transmission lines; Calibration; Coplanar waveguides; Impedance measurement; Integrated circuit measurements; Manufacturing; Microwave transistors; Monolithic integrated circuits; Probes; Scattering parameters; Transmission line measurements;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/22.17426
Filename
17426
Link To Document