• DocumentCode
    811367
  • Title

    A general design methodology for the optimal multiple-field-limiting-ring structure using device simulator

  • Author

    Cheng, Xu ; Sin, Johnny K O ; Shen, John ; Huai, Yong-jin ; Li, Rui-zhen ; Wu, Yu ; Kang, Bao-wei

  • Author_Institution
    Dept. of Electron. Eng., Beijing Polytech. Univ., China
  • Volume
    50
  • Issue
    11
  • fYear
    2003
  • Firstpage
    2273
  • Lastpage
    2279
  • Abstract
    A design methodology for the optimal multiple-field-limiting-ring (FLR) termination structure is proposed. In the methodology, a simple modeling structure is developed to find the so-called BV-spacing curve, from which the optimal structure can be obtained directly without trial and error. The results given by the methodology is in excellent agreement with the experimental results. The applicability of the methodology is also investigated in a wide scope, which shows that the methodology has a very good performance in the medium-voltage-range FLR termination design.
  • Keywords
    doping profiles; leakage currents; power MOSFET; power semiconductor devices; semiconductor device breakdown; semiconductor device models; surface potential; 600 V; BV-spacing curve; VDMOSFET terminal design; breakdown voltages; device simulator; general design methodology; high-voltage power semiconductor devices; leakage current profile; medium-voltage-range FLR termination design; modeling structure; optimal multiple-field-limiting-ring structure; optimization process; oxide-charge density; ring-to-ring spacing; substrate-doping profile; surface potential profile; Computational modeling; Design methodology; Doping profiles; Medical simulation; Microelectronics; Power semiconductor devices; Semiconductor device doping; Semiconductor devices; Silicon compounds; Substrates;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2003.815132
  • Filename
    1239056