Optical Emission Characteristics of Atmospheric-Pressure Nonequilibrium Microwave Discharge and High-Frequency DC Pulse Discharge Plasma Jets

Author

Yuji, Toshifumi ; Fujii, Shuitsu ; Mungkung, Narong ; Akatsuka, Hiroshi

Author_Institution

Fac. of Educ. & Culture, Univ. of Miyazaki, Miyazaki

Volume

37

Issue

6

fYear

2009

fDate

6/1/2009 12:00:00 AM

Firstpage

839

Lastpage

845

Abstract

With an aim to understand the mechanism of surface processing by atmospheric-pressure nonequilibrium discharge plasma jets, we measured the vibrational and rotational temperatures in the plasmas by means of optical emission spectroscopy (OES) measurement method. This paper focuses on the OES measurement method using a torch-shaped atmospheric-pressure nonequilibrium discharge plasma jet power supply consisting of a microwave (2.45-GHz) generator and a high-frequency (5.0-10-kHz) dc pulse power supply, using a gas mixture of Ar (8.0 L/min) and N₂ (0.1-0.5 L/min) as the discharge plasma gas, and changing the flow rate of N₂ gas at the input power of 100-150 W. Upon comparing vibrational and rotational temperatures (0.18-0.27 eV) determined from the OES measurement method using two types of atmospheric-pressure nonequilibrium discharge plasma jets, results indicate that the microwave discharge plasma jet has considerably low vibrational and rotational temperatures.

Keywords

high-frequency discharges; plasma diagnostics; plasma flow; plasma fluctuations; plasma jets; Ar-N₂ gas mixture; atmospheric-pressure nonequilibrium microwave discharge; dc pulse power supply; electron volt energy 0.18 eV to 0.27 eV; flow rate; frequency 2.45 GHz; frequency 5 kHz to 10 kHz; high-frequency DC pulse discharge plasma jets; optical emission spectroscopy; power 100 W to 150 W; rotational temperatures; surface processing; vibrational temperatures; $hbox{Ar} + hbox{N}_{2}$ mixture gas; high-frequency dc pulse; microwave; plasma jet; vibrational and rotational temperatures;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2009.2017539

Filename

4908959