An ultraminiature CMOS pressure sensor for a multiplexed cardiovascular catheter

A multiplexed ultraminiature pressure sensor designed for use in a cardiovascular catheter is described. The sensor operates from only two loads, which are shared by two sensors per catheter. The sensing chip is 350 μm wide by 1.4 mm long by 100 μm thick. CMOS readout circuitry at the sensing site converts applied pressure to a frequency variation in the supply current, which is detected at the end of the catheter by a microprocessor-controlled interface. The nominal pressure sensitivity is 2 kHz/fF about a zero-pressure output frequency of 2.7 MHz. This on-site circuitry contains two reference capacitors which allow external compensation for nonlinearity and temperature sensitivity and has an idle-state power dissipation of less than 50 μW. With the transducer sealed at ambient pressure, the device can resolve pressure variations of about 3 mmHg, while vacuum-sealed devices do considerably better and should permit <2 mmHg resolution in practical systems