Title :
Modeling and design optimization of large-deflection piezoelectric folded cantilever microactuators
Author :
Huajun Fang ; Litian Liu ; Tianling Ren
Author_Institution :
Inst. of Microelectron, Tsinghua Univ., Beijing, China
Abstract :
This paper presents a novel, large-deflection piezoelectric folded cantilever microactuator (PFCM). A multimorph model for the large-deflection PFCM is derived, in which unified formulas for deflection angle and vertical displacement of N-level PFCM are obtained. Based on the model, multilayer PFCMs using PZT film are designed and optimized. The large-deflection PFCM is extensively applicable to microdevices or microsystem applications such as micro-optical switches, microelectromechanical systems (MEMS) scanners, and so forth.
Keywords :
cantilevers; design engineering; microactuators; optimisation; piezoelectric actuators; PZT film; deflection angle; large-deflection piezoelectric folded cantilever microactuators; microdevices; microsystem applications; multimorph model; vertical displacement; Buffer layers; Design optimization; Electrodes; Microactuators; Microelectromechanical systems; Micromechanical devices; Nonhomogeneous media; Piezoelectric actuators; Silicon; Voltage; Computer Simulation; Computer-Aided Design; Elasticity; Electrochemistry; Equipment Design; Equipment Failure Analysis; Miniaturization; Models, Theoretical; Motion; Stress, Mechanical; Transducers; Ultrasonography;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.1588409
