A metal-coated polymer micromirror for strain-driven high-speed multiaxis optical scanning

We have developed a new polymer-based micromirror device capable of high-speed multiaxis out-of-plane scanning motion. The whole device structure integrates a metal-coated three-dimensional polydimethylsiloxane micromirror structure with an optically smooth surface and a single layer of silicon-on-insulator electrostatic comb-drive actuators. The high-strain mechanical elasticity of the polymer material allows for translating the in-plane comb-drive motions into three-degree-of-freedom scanning motion with a single actuator layer. The simple structure design and rapid response characteristics of the demonstrated device may lead to high-yield high-performance scanning micromirror technology.