DocumentCode
814923
Title
IEEE Transactions on Semiconductor Manufacturing publication information
Volume
19
Issue
1
fYear
2006
Abstract
Provides a listing of publications staff, current committee members and society officers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2006.870946
Filename
1588854
Link To Document