Impact of nonuniform graded dopant profile in polysilicon gate on gate leakage current

In a MOSFET, a nonuniform, graded vertical dopant profile in the polysilicon gate causes a potential drop at the polysilicon/oxide interface. In this paper, the effect of this potential drop on the gate leakage current has been evaluated for the first time. The extent of variations of this affected gate leakage current with gate oxide thickness, gate length, and gate and drain bias conditions have been assessed with device simulation for an nMOS at 0.13 μm low-voltage process. The results provide a guideline to the severity of this effect from the point of view of device and circuit operation and standby power consumption.