DocumentCode :
819206
Title :
Measuring the thickness of a thin film conductor using solenoid coils
Author :
Nakane, Hiroshi ; Sohara, Yoshio ; Omori, Shunichi
Author_Institution :
Science University of Tokyo
Volume :
40
Issue :
2
fYear :
1991
fDate :
4/1/1991 12:00:00 AM
Firstpage :
429
Lastpage :
432
Keywords :
Conducting materials; Conductive films; Conductivity; Conductors; Frequency; Impedance; Solenoids; Superconducting coils; Thickness measurement; Transistors;
fLanguage :
English
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9456
Type :
jour
DOI :
10.1109/TIM.1990.1032978
Filename :
1032978
Link To Document :
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