Title :
Measuring the thickness of a thin film conductor using solenoid coils
Author :
Nakane, Hiroshi ; Sohara, Yoshio ; Omori, Shunichi
Author_Institution :
Science University of Tokyo
fDate :
4/1/1991 12:00:00 AM
Keywords :
Conducting materials; Conductive films; Conductivity; Conductors; Frequency; Impedance; Solenoids; Superconducting coils; Thickness measurement; Transistors;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.1990.1032978