DocumentCode :
820382
Title :
A Revolutionary Chipmaking Technique?
Author :
Savage, Neil
Volume :
40
Issue :
11
fYear :
2003
Firstpage :
18
Lastpage :
18
Keywords :
Costs; Lenses; Lithography; Manufacturing; Micromirrors; Mirrors; Optical arrays; Optical interferometry; Semiconductor lasers; Surface emitting lasers;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.2003.1242949
Filename :
1242949
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=820382
