DocumentCode

820382

Title

A Revolutionary Chipmaking Technique?

Author

Savage, Neil

Volume

40

Issue

11

fYear

2003

Firstpage

18

Lastpage

18

Keywords

Costs; Lenses; Lithography; Manufacturing; Micromirrors; Mirrors; Optical arrays; Optical interferometry; Semiconductor lasers; Surface emitting lasers;

fLanguage

English

Journal_Title

Spectrum, IEEE

Publisher

ieee

ISSN

0018-9235

Type

jour

DOI

10.1109/MSPEC.2003.1242949

Filename

1242949