Title :
Planar proton implanted VCSEL´s and fiber-coupled 2-D VCSEL arrays
Author :
Zeeb, Eberhard ; Möller, Bernd ; Reiner, Gernot ; Ries, Manfred ; Hackbarth, Thomas ; Ebeling, Karl Joachim
Author_Institution :
Dept. of Optoelectron., Ulm Univ., Germany
fDate :
6/1/1995 12:00:00 AM
Abstract :
Efficient planar proton implanted InGaAs-GaAs MQW vertical-cavity surface-emitting laser diodes (VCSEL´s) and 2-D arrays are fabricated using molecular beam epitaxy and p-type beryllium doping. Using single-step grading and modulation δ-doping in the p-type AlGaAs-GaAs Bragg reflectors top surface emitting devices with a maximum wall-plug efficiency of 17.6% and a threshold voltage of 1.8 V are demonstrated. Transverse mode behavior is well described in terms of Laguerre-Gaussian functions. Independently addressable 10×10 arrays of 12 μm diameter VCSEL´s exhibit electrical 3-dB modulation bandwidths up to 6 GHz. Light from the array is simultaneously launched into a 10×10 multimode fiber bundle with coupling efficiency above 70% applying a simple butt-coupling technique
Keywords :
III-V semiconductors; gallium arsenide; indium compounds; ion implantation; laser beams; laser cavity resonators; laser modes; molecular beam epitaxial growth; optical fabrication; optical fibre couplers; quantum well lasers; semiconductor laser arrays; surface emitting lasers; 1.8 V; 12 mum; 17.6 percent; 2D arrays; 6 GHz; 70 percent; AlGaAs-GaAs; Be doping; Bragg reflectors; InGaAs-GaAs; Laguerre-Gaussian functions; MQW vertical-cavity surface-emitting laser diodes; butt-coupling technique; coupling efficiency; fiber-coupled 2-D VCSEL arrays; independently addressable 10×10 arrays; modulation δ-doping; modulation bandwidths; molecular beam epitaxy; multimode fiber bundle; p-AlGaAs-GaAs; planar proton implanted laser diodes; single-step grading; threshold voltage; wall-plug efficiency; Delta modulation; Diode lasers; Doping; Molecular beam epitaxial growth; Optical arrays; Optical fiber devices; Protons; Quantum well devices; Semiconductor laser arrays; Vertical cavity surface emitting lasers;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.401249