Micromachined W-band filters

Author

Robertson, Stephen V. ; Katehi, Linda P B ; Rebeiz, Gabriel M.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

44

Issue

4

fYear

1996

fDate

4/1/1996 12:00:00 AM

Firstpage

598

Lastpage

606

Abstract

Results are presented for high performance planar W-band filters based on silicon micromachining techniques common in microsensor fabrication. Two types of micromachined planar transmission lines are studied: microshield line and shielded membrane microstrip (SMM) line. In both of these structures, the conducting lines are suspended on thin dielectric membranes. These transmission lines are essentially “floating” in air, possess negligible levels of dielectric loss, and do not suffer from the parasitic effects of radiation and dispersion. A 90 GHz low pass filter and several 95 GHz bandpass filters are tested and display excellent performance which cannot be achieved with traditional substrate supported circuits in CPW or microstrip configurations. A full-wave finite-difference time-domain (FDTD) technique verifies the measured performance of the W-band circuits and provides a basis for comparison between the performances of membrane supported circuits and equivalent substrate supported circuits

Keywords

band-pass filters; finite difference time-domain analysis; low-pass filters; micromachining; microstrip filters; millimetre wave filters; 90 GHz; 95 GHz; CPWs; W-band filters; bandpass filters; dielectric loss; dielectric membranes; dispersion; fabrication; floating lines; full-wave finite-difference time-domain technique; low pass filters; membrane supported circuits; microshield lines; parasitic effects; planar transmission lines; radiation; shielded membrane microstrip lines; silicon micromachining; substrate supported circuits; Biomembranes; Circuit testing; Dielectric losses; Dielectric substrates; Filters; Finite difference methods; Micromachining; Planar transmission lines; Silicon; Time domain analysis;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.491027

Filename

491027