Title :
On-wafer microwave measurement setup for investigations on HEMTs and high-Tc superconductors at cryogenic temperatures down to 20 K
Author :
Meschede, Herbert ; Reuter, Ralf ; Albers, Jurgen ; Kraus, Jorg ; Peters, Dirk ; Brockerhoff, Wolfgang ; Tegude, Franz-Josef ; Bode, Michael ; Schubert, Jurgen ; Zander, Willi
Author_Institution :
Duisburg Univ., Germany
fDate :
12/1/1992 12:00:00 AM
Abstract :
An on-wafer measurement setup for the microwave characterization of HEMTs and high-Tc superconductors at temperatures down to 20 K is presented. Both S-parameter and noise measurements can be performed in the frequency range from 45 MHz to 40 GHz and 2 GHz to 18 GHz, respectively, using standard calibration techniques and commercial microwave probe tips. Microwave measurements on a pseudomorphic FET and an AlGaAs-GaAs HEMT as well as investigations on a superconducting filter are presented to demonstrate the efficiency of the developed system
Keywords :
MMIC; S-parameters; cryogenics; electric noise measurement; high electron mobility transistors; high-temperature superconductors; integrated circuit testing; microwave measurement; semiconductor device noise; semiconductor device testing; solid-state microwave devices; superconducting microwave devices; 20 K; 45 MHz to 40 GHz; AlGaAs-GaAs; HEMTs; S-parameter; commercial microwave probe tips; cryogenic temperatures; high-Tc superconductors; microwave characterization; microwave measurement; noise measurements; on-wafer measurement setup; pseudomorphic FET; standard calibration techniques; superconducting filter; Calibration; Frequency; HEMTs; MODFETs; Measurement standards; Microwave measurements; Noise measurement; Performance evaluation; Superconductivity; Temperature;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
