Effect of critical dimension variation on SAW correlator energy

Author

Skinner, J.L. ; Cardinale, G.F. ; Talin, A. Alec ; Brocato, R.W.

Author_Institution

Sandia Nat. Labs., Livermore, CA, USA

Volume

53

Issue

2

fYear

2006

Firstpage

497

Lastpage

501

Abstract

The effect of critical dimension (CD) variation and metallization ratio on the efficiency of energy conversion of a surface acoustic wave (SAW) correlator is examined. We find that a 10% variation in the width of finger electrodes predicts only a 1% decrease in the efficiency of energy conversion. Furthermore, our model predicts that a metallization ratio of 0.74 represents an optimum value for energy extraction from the SAW by the interdigitated transducer (IDT).

Keywords

acoustic transducers; correlators; metallisation; signal processing; surface acoustic wave devices; SAW correlator energy; critical dimension variation; interdigitated transducer; metallization ratio; surface acoustic wave; Correlators; Energy conversion; Frequency response; Laboratories; Radio frequency; SAW filters; Sensor systems; Surface acoustic wave devices; Surface acoustic waves; Wireless sensor networks; Acoustics; Biosensing Techniques; Energy Transfer; Equipment Design; Equipment Failure Analysis; Microelectrodes; Reproducibility of Results; Sensitivity and Specificity; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2006.1593390

Filename

1593390