Equipment Throughput Optimization by Means of Speed Loss Analysis

Consistent with the semiconductor industry´s focus on continuous improvement, increased throughput, and shorter cycle times, this paper describes a methodology for the qualification and quantification of speed loss at a toolset level. The identification and quantification of the speed loss categories, along with implementation of specific actions targeted at these losses, has enabled our fab to have a direct impact on overall capacity and throughput performance of our toolsets.