Title :
Technological Advances in the Manufacture of Radiation-Hardened CMOS Integrated Circuits
Author :
Pikor, A. ; Reiss, E.M.
Author_Institution :
RCA Solid State Division Route 202 Somerville, N. J. 08876
Keywords :
Annealing; CMOS integrated circuits; CMOS process; CMOS technology; Furnaces; Integrated circuit manufacture; Integrated circuit technology; Satellites; Temperature; Testing;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1977.4329162