• DocumentCode
    831657
  • Title

    Insect-like microrobots with external skeletons

  • Author

    Shimoyama, Lsao ; Miura, Hirofumi ; Suzuki, Kenji ; Ezura, Yuichi

  • Author_Institution
    Dept. of Mechano-Inf., Tokyo Univ., Japan
  • Volume
    13
  • Issue
    1
  • fYear
    1993
  • Firstpage
    37
  • Lastpage
    41
  • Abstract
    A microrobot with an external skeleton like that of an insect is proposed. The microrobot can be implemented using rigid plates and elastic joints. A large scale model consisting of plastic plates, springs and solenoids is shown to demonstrate its motion. Several microsized models have been built on silicon wafers, using polysilicon as rigid plates and polyimide as elastic joints.<>
  • Keywords
    micromechanical devices; robots; Si wafers; elastic joints; microrobot; model; polyimide; polysilicon; robotics; solenoids; Insects; Joints; Large-scale systems; Plastics; Polyimides; Semiconductor device modeling; Silicon; Skeleton; Solenoids; Springs;
  • fLanguage
    English
  • Journal_Title
    Control Systems, IEEE
  • Publisher
    ieee
  • ISSN
    1066-033X
  • Type

    jour

  • DOI
    10.1109/37.184791
  • Filename
    184791