• DocumentCode
    833240
  • Title

    Extending integrated-circuit yield-models to estimate early-life reliability

  • Author

    Barnett, Thomas S. ; Singh, Adit D. ; Nelson, Victor P.

  • Author_Institution
    IBM Microelectron., Essex Junction, VT, USA
  • Volume
    52
  • Issue
    3
  • fYear
    2003
  • Firstpage
    296
  • Lastpage
    300
  • Abstract
    The integrated yield-reliability model for integrated circuits allows one to estimate the yield, following both wafer probe and burn-in testing. The model is based on the long observed clustering of defects and the experimentally verified relation between defects causing wafer probe failures, and defects causing infant mortality failures. The 2-parameter negative binomial distribution is used to describe the distribution of defects over a semiconductor wafer. The clustering parameter α, while known to play a key role in accurately determining wafer probe yields, is shown, for the first time, to play a similar role in determining burn-in fall-out. Numerical results indicate that the number of infant mortality failures predicted by the clustering model can differ appreciably from calculations that ignore clustering. This is particularly apparent when wafer probe yields are low, and clustering is high.
  • Keywords
    binomial distribution; integrated circuit reliability; integrated circuit yield; 2-parameter negative binomial distribution; burn-in fall-out; burn-in testing; defects clustering; early-life reliability estimation; infant mortality failures; integrated yield-reliability model; integrated-circuit yield-models; semiconductor wafer; wafer probe failures; Circuit testing; Digital integrated circuits; Integrated circuit modeling; Integrated circuit reliability; Integrated circuit testing; Integrated circuit yield; Manufacturing; Probes; Semiconductor device modeling; Yield estimation;
  • fLanguage
    English
  • Journal_Title
    Reliability, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9529
  • Type

    jour

  • DOI
    10.1109/TR.2003.816418
  • Filename
    1248646