Title :
Ignition of Peripheral Plasma in Capacitive Discharges
Author :
Kim, Gon Jun ; Lee, Sung Hee ; Lee, Jae Koo
Author_Institution :
Dept. of Electron. & Electr. Eng., Pohang Univ. of Sci. & Technol., Pohang
Abstract :
Ignition of peripheral plasma was examined in low-pressure (100-mtorr) RF capacitive coupled plasma by means of kinetic and fluid models. Plasma density and potential profiles are presented to visualize peripheral-plasma ignition. A dielectric gap size is an important parameter for a dense and stable plasma source.
Keywords :
discharges (electric); ignition; plasma density; plasma dielectric properties; plasma sources; RF capacitive coupled plasma; capacitive discharges; dielectric gap size; ignition; peripheral plasma; plasma density; plasma potential; plasma source; pressure 100 mtorr; Dielectrics; Ignition; Plasma applications; Plasma confinement; Plasma density; Plasma devices; Plasma materials processing; Plasma sources; Plasma stability; Radio frequency; Capacitive coupled plasma (CCP); modeling; peripheral plasma;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.922466
