Power Deposition Profiles in Magnetized Inductively Coupled Plasma

Power deposition profiles and spatial distributions of electron density and temperature of magnetized inductively coupled argon plasma are visualized using self-consistent fluid simulation. The model uses Ampere´s law with anisotropic conductivity, particle, and energy conservation equation with anisotropic transport coefficient. Spatial distribution of power absorption shows clear development of cavity mode of low-frequency R wave. More uniform density distribution is found in magnetized discharge than in ordinary inductively coupled discharge. The effects of nonuniform electron density and magnetic flux density are shown.