• DocumentCode
    834090
  • Title

    A low-cost fabrication technique for symmetrical and asymmetrical layer-by-layer photonic crystals at submillimeter-wave frequencies

  • Author

    Gonzalo, Ramon ; Martinez, Beatriz ; Mann, Chris M. ; Pellemans, Harm ; Bolivar, Peter Haring ; De Maagt, Peter

  • Author_Institution
    Dept. Electr. & Electron., Univ. Publica de Navarra, Spain
  • Volume
    50
  • Issue
    10
  • fYear
    2002
  • fDate
    10/1/2002 12:00:00 AM
  • Firstpage
    2384
  • Lastpage
    2392
  • Abstract
    This paper presents a rapid, versatile, and practical technique for the manufacture of layer-by-layer photonic crystals in the millimeter- and submillimeter-wave regions. Mechanical machining is used to derive a rugged layer-by-layer structure from high-resistivity silicon wafers. Unlike traditional anisotropic etching techniques, this method does not rely on any particular crystal orientation of the substrate and allows greater flexibility in the photonic crystal design. Automatic alignment of alternating layers is achieved via careful placement of the separation cuts. Using this ability, two configurations of photonic crystals are realized and their RF characteristics are measured and presented. Firstly, a symmetrical photonic crystal is studied as an initial demonstration of the technique. This is followed by an asymmetrical example, where a different frequency response is observed for the two orthogonal polarizations of the incident radiation. Two measurement techniques are used to characterize the photonic crystals and the merits of each are discussed. Theoretical predictions are seen to agree well with the measured behavior.
  • Keywords
    micromachining; microwave photonics; optical fabrication; photonic band gap; sputter etching; submillimetre wave devices; RF characteristics; Si; asymmetrical layer-by-layer photonic crystals; automatic alternating layer alignment; deep dry-etch processing; frequency response; high-resistivity silicon wafers; layer-by-layer photonic crystal fabrication; mechanical machining; millimeter-wave regions; orthogonal polarization; photonic crystal design flexibility; rugged layer-by-layer structure; separation cuts placement; submillimeter-wave frequencies; symmetrical layer-by-layer photonic crystals; Anisotropic magnetoresistance; Etching; Fabrication; Frequency response; Machining; Photonic crystals; Pulp manufacturing; Radio frequency; Silicon; Submillimeter wave technology;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/TMTT.2002.803446
  • Filename
    1038879