Fabrication development for nanowire GHz-counting-rate single-photon detectors

Author

Yang, Joel K.W. ; Dauler, Eric ; Ferri, Antonin ; Pearlman, Aaron ; Verevkin, Aleksandr ; Gol´tsman, Gregory ; Voronov, Boris ; Sobolewski, Roman ; Keicher, William E. ; Berggren, Karl K.

Author_Institution

Massachusetts Inst. of Technol., Cambridge, MA, USA

Volume

15

Issue

2

fYear

2005

fDate

6/1/2005 12:00:00 AM

Firstpage

626

Lastpage

630

Abstract

We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.

Keywords

counters; electron resists; microwave detectors; nanopatterning; nanowires; niobium compounds; photon counting; superconducting epitaxial layers; superconducting microwave devices; superconducting particle detectors; HSQ-based process; NbN; device patterning; epitaxial niobium-nitride thin films; hydrogen silsesquioxane negative-tone spin-on-glass resist; nanowire GHz-counting-rate single-photon detectors; nanowire detectors; standard polymethyl-methacrylate organic positive-tone electron-beam resist; superconductive single-photon detectors; Fabrication; Hydrogen; Infrared detectors; Nanostructures; Optical fiber communication; Photodetectors; Resists; Superconducting films; Superconductivity; Testing; Epitaxial niobium-nitride thin films; hydrogen silsesquioxane electron-beam resist; superconductive single-photon detectors;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2005.849971

Filename

1439716