ZnO-on-Si mode conversion resonator

A two-port admittance matrix model is presented to describe the operation of the surface-acoustic-wave (SAW) mode conversion resonator. A unique treatment of the transducer coupling is applied to the specific case of the mode conversion device. The model takes into account the simultaneous presence of propagating Rayleigh and Sezawa waves and allows an equivalent circuit to be constructed to describe the resonator behavior. The model makes it possible to determine the reflector array separation and the interdigital transducer placement necessary for resonance and maximum coupling. Finally, experimental results are shown as verification of the device theory.<>