Title :
Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides
Author :
Schrauwen, Jonathan ; Van Laere, Frederik ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Gent
fDate :
6/1/2007 12:00:00 AM
Abstract :
We have designed and fabricated an efficient grating coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88-nm-wide slits, etched at an angle of 58deg to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%
Keywords :
diffraction gratings; etching; focused ion beam technology; integrated optics; optical design techniques; optical fibre couplers; optical fibre fabrication; silicon-on-insulator; 88 nm; Si-SiO2; alumina hard mask; direct etching; focused ion beam; focused-ion-beam fabrication; iodine gas; light coupling; optical fibers; silicon-on-insulator waveguides; slanted fiber coupler; slanted grating couplers; Etching; Fiber gratings; Optical coupling; Optical design; Optical device fabrication; Optical fiber couplers; Optical fibers; Optical surface waves; Optical waveguides; Silicon on insulator technology; Fiber coupler; focused-ion-beam (FIB); slanted grating coupler;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2007.897293
