Digitized Layouts and Impurity Profiles of Integrated Circuit Monoliths Using Particle Induced X-Ray Fluorescence

Preliminary results from a possible method for obtaining information regarding the location, surface composition, and structure of a semiconductor device on an integrated circuit monolith using particle backscattering and x-ray detection techniques is reported. A microcomputer based detection system was used to accumulate emissions data, produced by an accelerator beam scanned across an area of the monolith. Peak detection software was used to compute the energies of the characteristic peaks produced for each beam position within the area. The effort was directed toward obtaining digitized images of the spatial distributions and concentrations of each dopant element.