DocumentCode
844376
Title
Local temperature response to pulsed discharges in electronic discharge machining (EDM) environment
Author
Revaz, Bernard ; Emery, Jonathan ; Witz, Grégoire ; Flükiger, René ; Perez, Roberto ; Carron, Jonathan ; Rappaz, Michel
Author_Institution
Dept. De Phys., Univ. of Geneva, Switzerland
Volume
33
Issue
3
fYear
2005
fDate
6/1/2005 12:00:00 AM
Firstpage
1066
Lastpage
1071
Abstract
We report on local temperature measurements performed during single discharges in electronic discharge machining (EDM) environment. Measurements have been performed with two different setups. One being a thermal device consisting of 14 thin film Au-Pd thermocouples. This device with 4-μm2 large junctions was patterned using standard photolithography. The distance between the junctions (i.e., the local resolution of the device) is 20 μm, whereas the sensitivity is 10 μV/K at 150°C. The other setup being a fast infrared charge-coupled device (CCD) camera with home made control electronics. An acquisition rate of 80 000 pictures/s with a 10-μm local resolution was obtained. Using standard electron discharge machining (EDM) equipment, the temperature response due to a single discharge was measured with both the equipment, which show excellent agreement. The maximum temperature measured on the backside of a 20-μm-thick foil is 590°C. Analysis of the thermovoltage noise pattern allowed precise determination of the beginning and duration of the discharge. The numerical simulation of the process is presented and discussed.
Keywords
discharges (electric); electrical discharge machining; plasma diagnostics; plasma simulation; plasma temperature; 10 mum; 150 degC; 20 mum; 590 degC; CCD; control electronics; electronic discharge machining; fast infrared charge-coupled device camera; local temperature measurements; numerical simulation; photolithography; pulsed discharges; thermal device; thermovoltage noise pattern; thin film thermocouples; Charge coupled devices; Charge-coupled image sensors; Electrons; Lithography; Machining; Measurement standards; Performance evaluation; Temperature measurement; Temperature sensors; Thin film devices; Discharges; microsensors; temperature measurement;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2005.848611
Filename
1440544
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