• DocumentCode
    846552
  • Title

    RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers

  • Author

    Bhaskaran, M. ; Sriram, S. ; Holland, A.S.

  • Author_Institution
    Microelectron. & Mater. Technol. Centre, RMIT Univ., Melbourne, Vic., Australia
  • Volume
    42
  • Issue
    4
  • fYear
    2006
  • Firstpage
    244
  • Lastpage
    245
  • Abstract
    Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35)O3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300°C, much lower than the typically reported 650°C for deposition on platinum.
  • Keywords
    X-ray diffraction; X-ray photoelectron spectra; ferroelectric devices; ferroelectric thin films; gold; lead compounds; piezoelectric thin films; piezoelectric transducers; scanning electron microscopy; sputter deposition; strontium compounds; 300 C; PSZT thin-films; Pb0.92Sr0.08(Zr0.65Ti0.35)O3-Au; RF magnetron sputtering; X-ray diffractometry; X-ray photoelectron spectroscopy; ferroelectric transducers; perovskite phase; piezoelectric transducers; scanning electron microscopy;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20063422
  • Filename
    1599654
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=846552