DocumentCode
849219
Title
Impurity atom diffusion into finite slices of semiconductor material
Author
Kennedy, D.P. ; Murley, P.C.
Volume
51
Issue
2
fYear
1963
Firstpage
372
Lastpage
373
Keywords
Bismuth; Cyclotrons; Diffusion processes; Frequency; Plasma materials processing; Plasma temperature; Plasma waves; Semiconductor impurities; Semiconductor materials; Solid state circuits;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1963.1788
Filename
1443718
Link To Document