Design of Bragg Grating Sensors Based on Submicrometer Optical Rib Waveguides in SOI

Author

Passaro, Vittorio M N ; Loiacono, Renzo ; Amico, Giuseppe D. ; Leonardis, Francesco De

Author_Institution

Dipt. di Elettrotec. ed Elettron., Politec. di Bari, Bari

Volume

8

Issue

9

fYear

2008

Firstpage

1603

Lastpage

1611

Abstract

A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10^-4 refractive index unit has been calculated for a 173-mum-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.

Keywords

Bragg gratings; coupled mode analysis; finite element analysis; integrated optics; optical fabrication; optical sensors; optical waveguides; rib waveguides; silicon-on-insulator; Bragg grating sensors; SOI; coupled mode theory; finite-element method; integrated optical sensor; optical fabrication; refractive index; silicon-on-insulator; submicrometer optical rib waveguides; Bragg gratings; Coupled mode analysis; Optical design; Optical refraction; Optical sensors; Optical variables control; Optical waveguide theory; Optical waveguides; Performance analysis; Silicon on insulator technology; Bragg grating; integrated optics; optical sensors; silicon photonics; silicon-on-insulator (SOI);

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2008.929068

Filename

4609974