A 252- ${\rm V/lux}{\cdot}{\rm s}$ , 16.7-Million-Frames-Per-Second 312-kpixel Back-Side-Illuminated Ultrahigh-Speed Charge-Coupled Device

We developed a 312-kpixel back-side-illuminated ultrahigh-speed charge-coupled device (CCD) that has a sensitivity of 252 V/lux · s and is capable of operating at 16.7 Mfps. The potential profile of the pixel was designed by using a 3-D semiconductor device simulator. The high sensitivity results from the unit having fill factor and time aperture ratios of 100% and a high optical utilization ratio. Its sensitivity is 12.7 times that of a front-side-illuminated image sensor. Ultrahigh-speed shooting was enabled by an in situ storage image sensor. By reducing the wiring resistance and dividing the image area into eight blocks, a maximum frame rate of 16.7 Mfps was attained. The total pixel count is 760 horizontally and 411 vertically. The burst capturing speed is thus 5.2 Tpixel/s, making it the fastest imaging device to date.